74-пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ-пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ (Tuomo Suntola), пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅ пїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ Millennium Technology Prize, пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ 1 пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅ. "пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ (ALD, atomic layer deposition) пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅ" - пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, - "пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅ пїЅпїЅпїЅ пїЅпїЅпїЅпїЅ, пїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ".

пїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ ALD пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ. пїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅ пїЅ 1974 пїЅпїЅпїЅпїЅ, пїЅ пїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ-пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ.

пїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ, пїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ ALD, пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ 1990-пїЅ пїЅпїЅпїЅпїЅпїЅ. пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ пїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅ пїЅпїЅпїЅ пїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ.

пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅ, пїЅ пїЅпїЅпїЅ пїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ.

пїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅ пїЅпїЅпїЅпїЅ Finnish Millennium Technology Prize пїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ 2004 пїЅпїЅпїЅпїЅ, пїЅ пїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ. пїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ.

пїЅ пїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ Finnish Millennium Technology Prize пїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ "пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ" пїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ-пїЅпїЅ (Tim Berners-Lee), пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅ Linux пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ (Linus Torvalds), пїЅ пїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅ, пїЅпїЅпїЅпїЅпїЅ пїЅпїЅпїЅпїЅпїЅпїЅпїЅ (Shinya Yamanaka).